Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5637802A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1995 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Feb 28, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.