Method for producing a microsystem and forming a microsystem laser therefrom

US5637885A · kind A · utility

Assignee

• Deutsche Aerospace AG · DE

Inventors

• Stefan Heinemann · Ann Arbor, US
• Axel Mehnert · Schongau, DE
• Peter Peuser · Riemerling, DE
• Nikolaus Schmitt · Heidelberg, DE
• Helmut Seidel · Starnberg, DE

Key dates

• Filing date: Apr 7, 1995
• Grant date: Jun 10, 1997
• Expiry date: Apr 7, 2015

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/4025
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to a method for producing a microsystem and from it forming a microsystem laser, which preferably has a vertical structural element by contacting of wafer plates, which carry different functional elements of a system, so that this system on the one hand thus includes heterogeneous functions such as actuators, optics, sensors, cooling systems, micromechanics and electronics, and on the other hand, the wafer carrying these functions permits a relatively homogeneous processing of quite similar functions integrated each on one wafer, so that the complexity of the system is created for the first time for the vertical arrangement of these functions.