Confocal optical microscope and length measuring device using this microscope
US5638206A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1994 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Sep 29, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A first a confocal optical microscope in which a good image with high contrast can be observed with which a bright image can be observed over a long time interval. The confocal optical microscope has a quarter wave plate arranged in an optical path between an imaging lens and an objective such that it is inclined relative to a reference optics axis extending between the imaging lens and the objective. Furthermore, the confocal optical microscope has a shortwave radiation attenuator for attenuating light radiated from the light source with wavelengths of less than or equal to 340 nm. The confocal optical microscope can form part of a length measuring device which can take a length measurement of a sample to be measured with high measurement accuracy and high reproducibility. The length measuring device also has a movable carrier, a carrier device for a sample to be measured, a computing device, a display device and a control device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.