Capacitive thin films using diamond-like nanocomposite materials
US5638251A · kind A · utility
98Cited by
50References
27Claims
0Family size
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Key dates
| Filing date | Oct 3, 1995 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Oct 3, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/435
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of making capacitors comprising, providing as the dielectric and/or conductive layers, a material made from a diamond-like nanocomposite solid-state material having interpenetrating atomic scale networks of carbon in a diamond-like carbon network stabilized by hydrogen, a glass-like silicon network stabilized by oxygen, and optionally at least one additional network of dopant elements or dopant compounds having elements from Groups 1-7b and 8 of the periodic table.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.