Method of producing a piezoelectric/electrostrictive actuator
US5643379A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 22, 1995 |
| Grant date | Jul 1, 1997 |
| Priority date | — |
| Expiry date | Mar 22, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14387
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of producing a piezoelectric/electrostrictive actuator including preparing first, second and third ceramic green sheets, and laminating the green sheets to form an unfired ceramic body which is then fired. The first, second and third green sheets form spacer, closure, and connecting plates, respectively, the spacer plate having a plurality of windows. An outer surface of the connecting plate that is remote from the spacer plate is machined so as to have a maximum waviness of not larger than 50 .mu.m. Additionally, piezoelectric/electrostrictive elements are formed on an outer surface of the closure plate over respective pressure chambers defined by the windows in the spacer plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.