Manufacturing method of a quantum device
US5643828A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1995 |
| Grant date | Jul 1, 1997 |
| Priority date | — |
| Expiry date | Dec 19, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/962
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a quantum device such as a coupled quantum boxes device are disclosed. The quantum device comprises: a semiconductor substrate; a plurality of box portions made of a first semiconductor; and a layer made of a second semiconductor provided on circumferences of the box portions, a plurality of quantum boxes being provided with the box portions and the layer of the second semiconductor. The manufacturing method comprises the steps of: making a plurality of box portions of a first semiconductor on a semiconductor substrate; and covering circumferences of the box portions with a layer of a second semiconductor, a plurality of quantum boxes being provided with the box portions and the layer of the second semiconductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.