Patent · US Expired

High withstand voltage type semiconductor device having an isolation region

US5644157A · kind A · utility

19Cited by
9References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 22, 1996
Grant dateJul 1, 1997
Priority date
Expiry dateMay 22, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76286
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device which can compatibly achieve the improvement of the withstand voltage and the integration degree. A PN junction between a buried collector region 3 and a collector withstand voltage region 4 is subjected to reverse bias, and a depletion layer in the PN junction reaches a side dielectric isolation region 9a which dielectrically isolates the side of the collector withstand voltage region 4. A circumferential semiconductor region 14 which is in adjacency to the collector withstand voltage with the side dielectric isolation region 9a therebetween has an electric potential that is approximate to that at a base region 5 rather than that at the buried collector region 3. As a result, the depletion layer is subjected to the effect of low electric potential from both the base region 5 and the circumferential semiconductor region 14. This mitigates electrostatic focusing in the vicinity of the corner parts between the sides of the base region 5 and the bottom thereof, restraining the avalanche breakdown there and improving the withstand voltage there.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.