Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer

US5647574A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Michael Mettner · Ludwigsburg, DE
• Armin Schuelke · Schwieberdingen, DE
• Christian Doering · Stuttgart, DE
• Thomas Schittny · Steinheim an der Murr, DE

Key dates

• Filing date: Dec 16, 1994
• Grant date: Jul 15, 1997
• Expiry date: Dec 16, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01F2007/068
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.