Systems and methods for monitoring material properties using microwave energy
US5648038A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 1995 |
| Grant date | Jul 15, 1997 |
| Priority date | — |
| Expiry date | Sep 20, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N22/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for monitoring workpiece and workpiece material characteristics using microwave energy are disclosed. A system includes a chamber, including means for generating variable frequency microwave energy; means for positioning a workpiece within the chamber; means for subjecting the workpiece to a plurality of different microwave frequencies; and means for monitoring characteristics of the workpiece. One or more characteristics of a workpiece, or workpiece material, may be monitored by positioning the workpiece within a chamber having means for generating variable frequency microwave energy; subjecting the workpiece to microwave irradiation at a plurality of frequencies; detecting power reflection for each one of the plurality of microwave frequencies to provide power reflection data; and comparing the power reflection data to a predetermined set of power reflection data. The result of signature analysis can be coupled with a product process controller to achieve a real-time feedback control on monitoring and adjusting of process parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.