Optical filter having alternately laminated thin layers provided on a light receiving surface of an image sensor
US5648653A · kind A · utility
46Cited by
18References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 1994 |
| Grant date | Jul 15, 1997 |
| Priority date | — |
| Expiry date | Oct 18, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
Abstract
An Optical filter is provided on a light receiving surface of an image sensor. The filter has a plurality of thin layers alternately laminated. The thin layers alternately consist of a dielectric layer having a high refractive index and a metal layer and each thin layer has its stress .sigma. in a range -5 GPa.ltoreq..sigma.<-0.2 GPa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.