System for inspecting pin grid arrays
US5648853A · kind A · utility
16Cited by
9References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 1995 |
| Grant date | Jul 15, 1997 |
| Priority date | — |
| Expiry date | May 18, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An arrangement for inspecting straightness of an array of pins in which the array is illuminated by a thin beam of light. Images of surfaces of the array of pins that are illuminated are projected on a photo-sensitive device. The array of pins is movable relative to the beam of light and the imaging device. The imaging device and photo-sensitive device are also movable relative to the array of pins.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.