Method of making polycrystalline thin film and superconducting oxide body
US5650378A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1995 |
| Grant date | Jul 22, 1997 |
| Priority date | — |
| Expiry date | Aug 3, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/732
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a polycrystalline thin film deposit acting as a substrate material composed of grains of a cubic structure in which the intergranular misorientation, defined as the orientation difference between the a-axes (or b-axes) of the neighboring grains, is less than 30 degrees. Such a substrate base is produced by depositing a target material on a base material by sputtering while irradiating the substrate base with ion beams at an oblique angle to the base. The preferred range of the oblique angle is between 40 to 60 degrees. Examples are presented of application of such textured polycrystalline substrate base for the production of superconducting oxide thin layer of outstanding superconducting properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.