Cryopump synchronous motor load monitor
US5651667A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 1994 |
| Grant date | Jul 29, 1997 |
| Priority date | — |
| Expiry date | Jan 18, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/10
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.