Microfabricated particle filter
US5651900A · kind A · utility
98Cited by
30References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1994 |
| Grant date | Jul 29, 1997 |
| Priority date | — |
| Expiry date | Mar 7, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2325/38
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.