Patent · US Expired

Method and apparatus for the production of metal-free areas during metal vapor deposition

US5652022A · kind A · utility

9Cited by

4References

4Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Wolfgang Achtner · Maintal, DE
Thomas Vogt · Regensburg, DE
Gunter Klemm · Nidda, DE
Detlef Eller · Hammersbach, DE

Key dates

Filing date	Jul 22, 1996
Grant date	Jul 29, 1997
Priority date	—
Expiry date	Jul 22, 2016

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/042
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An area of an insulating strip (3) which is to remain free of metal is covered by an endless cover strip (4), which rests on the insulating strip (3) and travels along with it at the same speed. Before it enters a vapor deposition zone (5), the cover strip is provided with a film of oil on the side facing the metal evaporator (6) and, after the cover strip (4) has passed through the vapor deposition zone (5) and after the cover strip (4) and the insulating strip (3) have been separated from each other, the oil which has been deposited from the vapor phase onto the cover strip (4) is removed by heating the cover strip (4) with a heater (7) installed in the immediate vicinity of the cover strip (4).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.