Method and apparatus for drying parts and microelectronic components using sonic created mist
US5653045A · kind A · utility
58Cited by
24References
12Claims
0Family size
Inventor
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67028
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for drying single or multiple parts or objects wherein the apparatus uses a drying chamber for containing said object or objects, said drying chamber having a closeable entryway for providing access to said drying chamber, the use of a sonic head disposed in said drying chamber attached to a source of drying liquid and an adjustable supply and drain attached to said drying chamber for introducing and removing said drying fluid to and from said drying chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.