Variable temperature scanning probe microscope based on a peltier device
US5654546A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 1995 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Nov 7, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A compact Peltier Device is used to heat or cool a small sample stage of a scanning probe (AFM or STM) microscope. The entire heating/cooling system may fit onto a small platen which may be suspended below the scanning probe where it may be held in place against magnetic balls. Alternatively, the sample stage may be supported by a Peltier Device, itself supported by a scanner such as a Piezoelectric scanner with a scanning probe tip held fixedly above the sample stage. The side of the Peltier Device in contact with the platen is cooled (or heated) by a small flow of water through a heat exchanger. The reservoir of water is held at ambient temperature, minimizing the temperature gradient generated between the sample platen and the main body of the microscope. The small mass of the sample stage results in rapid heating or cooling so that an equilibrium is attained rapidly. Heat transfer through the scanning tip is negligible. Condensation and contamination of the sample is prevented by operating the entire sample chamber in an inert gas environment. The inert gas is also at ambient temperature. Water and other contaminants are first removed from the gas by passing it over cold baffle…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.