Process monitor usig impedance controlled I/O controller
US5654895A · kind A · utility
11Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 1996 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Apr 4, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process monitor and a method of using the same to determine the relative strength of a semiconductor fabrication process are disclosed. An impedance control output from an impedance controller circuit located on a semiconductor device is retrieved. Based upon a value of the retrieved impedance control output, the relative strength of the semiconductor fabrication process used to fabricate the semiconductor device is determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.