Device and method for facilitating inspection of a specimen
US5655029A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1996 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Oct 30, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for the visual inspection of a specimen, comprising a first microscope for obtaining a magnified view of different areas of a specimen, a display monitor for displaying images of at least a subset of the different areas of the specimen, selection means for enabling the selection of a image displayed on the monitor, a second microscope for review of an area of the specimen corresponding to the selected image, a motorized stage for positioning said specimen with respect to the field of view of the second microscope, and a processor for determining the image selected and instructing the motorized stage to position the specimen so that the area of the specimen corresponding to the selected image is in the field of view of the second microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.