Method for making metal oxide sputtering targets (barrier powder envelope)
US5656216A · kind A · utility
6Cited by
11References
25Claims
0Family size
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Key dates
| Filing date | Aug 25, 1994 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Aug 25, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S264/36
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.