Resistive element having a resistivity which is thermally stable against heat treatment, and method and apparatus for producing same
US5656330A · kind A · utility
21Cited by
1References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1995 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Mar 22, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C7/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A resistive element is provided which is used on a cathode conductor side of a field emission type fluorescent display device and made of a hydrogenated amorphous silicon film. Nitride is added during deposition of the hydrogenated amorphous silicon film containing an impurity for controlling resistivity of the film. A method for producing the resistive element and an apparatus therefor are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.