Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm
US5656780A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 28, 1996 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Mar 28, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A simplified capacitive pressure transducer includes a conductive surface, a portion of which is a surface of a flexible diaphragm in direct contact with a pressure to be measured, and an insulating substrate defining a plurality of capacitor electrodes sized to accommodate the measurement of pressures within a particular pressure range. The pressure transducer includes a front housing and a rear housing which are fitted together to provide a transducer chamber within which a hybrid circuit is secured. The insulating substrate includes a reference capacitor electrode, a variable capacitor electrode and vias. The insulating substrate is mechanically coupled to the front housing such that the conductive surface of the front housing and the reference capacitor electrode form a reference capacitor, and the conductive surface and the variable capacitor electrode form a variable capacitor. The reference capacitor electrode and the variable capacitor electrode are electrically connected to the hybrid circuit through the vias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.