Micromechanical contact load force sensor for sensing magnitude and distribution of loads and tool employing micromechanical contact load force sensor
US5656785A · kind A · utility
101Cited by
16References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1995 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Aug 7, 2015 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61F2002/7635
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A micromechanical contact load force sensor is disclosed. The force sensor comprises an array of capacitive load cells on a substrate. The force sensor is able to sense high loads, on the order on 10.sup.9 N/m.sup.2, and distribute the load over a suitable number of the cells of the array while minimizing crosstalk between adjacent cells. The force sensor is useful in biological and robotic applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.