Chemical sensor utilizing a chemically sensitive electrode in combination with thin diamond layers
US5656827A · kind A · utility
25Cited by
4References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 1995 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | May 30, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid state chemical sensing device is described in which a chemically sensitive electrode, and at least one diamond film are deposited on a conductive or insulating substrate. The device forms a sensing structure in which conduction of current through the device in the presence of a target chemical is dominated by space charged limited current, thereby providing enhanced sensitivity and selectivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.