Technique for achieving preferred optical alignment in a scanning interferometer
US5657122A · kind A · utility
10Cited by
2References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 6, 1995 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Jun 6, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Alignment circuity and calibration method for a scanning interferometer. Phase shifts are introduced into the alignment servo to maximize overall modulation efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.