Integrated circuit probe card inspection system
US5657394A · kind A · utility
95Cited by
19References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1993 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Jun 4, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for inspecting integrated circuit probe cards using a video camera positioned to view probe points on the cards from below. A precision movement stage is used to move the video camera into a known position for viewing the probe points. Analysis of the video image and the stage position are used to determine the relative positions of the probe points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.