Substrate drying apparatus
US5657553A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Nov 28, 1995 |
| Grant date | Aug 19, 1997 |
| Priority date | — |
| Expiry date | Nov 28, 2015 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF26B21/145
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A substrate drying apparatus comprises a treatment vessel for containing IPA in the form of liquid, an IPA source for supplying IPA into the treatment vessel, a first heat exchanger which is equipped with a heat exchanger tube dipped in IPA and allowing steam to pass therein, the first heat exchanger allowing the steam and IPA to perform heat exchange therebetween to thereby evaporate IPA, and a second heat exchanger provided on or above an upper portion of the treatment vessel and equipped with a heat exchanger tube for allowing a coolant to pass therein, the second heat exchanger allowing the coolant and the evaporated IPA to perform heat exchange therebetween to thereby condense the evaporated IPA.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.