Transport system for thin film sputtering system
US5660114A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 10, 1995 |
| Grant date | Aug 26, 1997 |
| Priority date | — |
| Expiry date | May 10, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67733
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport drive system for use in a sputtering apparatus, particularly an in-line sputtering apparatus, is disclosed. The system transports a plurality of planar substrates and includes a plurality of transport beams having a C-shaped cross-section. Each transport beam has a first and second end, a first and second sides, a top surface, and a channel, disposed under the top portion, and forming a portion of the C-shaped cross-section. The transport beam includes a substrate carrier which secures the substrate or pallet at the top portion of the substrate or pallet, and which is mounted in an alignment with an off-center relationship with respect to the center of the transport beam. In addition, the system for transporting includes a plurality of drive beams. Each drive beam includes a plurality of horizontally-oriented guide wheels disposed on a top surface of the drive beam, the drive wheels engaging the channel of the transport beam. Each drive beam also includes a plurality of vertically-oriented wheel assemblies disposed in a plurality of U-shaped cavities in the drive beam. A motor is provided with each of the drive beams to drive the vertically-oriented wheel assemblies. A …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.