Stiff actuator active vibration isolation system
US5660255A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 1994 |
| Grant date | Aug 26, 1997 |
| Priority date | — |
| Expiry date | Apr 4, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41191
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An active vibration isolation system (10) includes a plurality of stiff actuators, such as piezoelectric motors (12a-c; 284, 350) which support a small mass (18) inside of a case (300). A passive isolator (20) is interposed between the small mass (18) and the payload mass (M.sub.p). In the instance where the stiff actuators are piezoelectric motors, the sidewalls of the case (300) are used to provide compressive force along the variable length of each of the horizontal piezoelectric motor elements (284, 350) to prevent damage to same. Compensation circuitry (24) is connected between velocity sensors (17) and the stiff actuators to control the variable length thereof in this move-out-of-the-way system (10) and to compensate for resonating modes. Optionally, a payload mass velocity sensor (26) and associated circuitry may be used to provide additional control. Shear decouplers (282a-c; 352, 360) are used in conjunction with the piezoelectric motor elements (12a-c; 284, 350) to minimize the amount of shear force acting on the motor elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.