Multi-dimensional capacitive transducer
US5661235A · kind A · utility
50Cited by
40References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 1995 |
| Grant date | Aug 26, 1997 |
| Priority date | — |
| Expiry date | Dec 20, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-dimensional capacitor transducer system. The multi-dimensional transducer includes a first capacitive transducer for imparting force or movement and/or detecting force, weight or position in a first direction and a second capacitive transducer for imparting force or movement and/or detecting force, weight or position in a second direction. The multi-dimensional transducer may be used to provide in situ imaging in micro-mechanical test systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.