Multi-purpose noninterceptive charged particle beam diagnostic device using diffraction radiation and method for its use
US5661304A · kind A · utility
4Cited by
4References
31Claims
0Family size
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Key dates
| Filing date | May 6, 1996 |
| Grant date | Aug 26, 1997 |
| Priority date | — |
| Expiry date | May 6, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24514
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for detecting diffraction radiation from a charged particle beam in order to measure parameters that characterize the charged particle beam. The charged particle beam passes near one or more edges, apertures, or interfaces between media of different dielectric constants such that the beam is not intercepted. This generates forward diffraction radiation and reflected diffraction radiation at an angle relative to the direction of the beam. The radiation passes through a focusing system and onto a detector which measures a desired parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.