Thin film actuated mirror array and method for the manufacture thereof
US5661611A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 1994 |
| Grant date | Aug 26, 1997 |
| Priority date | — |
| Expiry date | Oct 28, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided an array of M.times.N thin film actuated mirrors for use in an optical projection system comprising an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.N mirrors for reflecting light beams, each of the mirrors being placed on top of each of the actuating structures. An electrical signal is applied across the thin film layer of the motion-inducing material located between the pair of electrodes in each of the actuating structures, causing a deformation thereof, which will in turn deform the mirror placed on top thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.