Patent · US Expired

Apparatus for applying thin layers to a substrate

US5662784A · kind A · utility

8Cited by

4References

10Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Manfred Schuhmacher · Alzenau, DE
Erwin Winter · Hanau, DE
Andreas Sauer · Großostheim, DE
Dietmar Marquardt · Niederrodenbach, DE

Key dates

Filing date	Mar 25, 1996
Grant date	Sep 2, 1997
Priority date	—
Expiry date	Mar 25, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3438
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.