Transport container for wafer-shaped objects

US5664679A · kind A · utility

Assignee

• JENOPTIK GmbH · DE

Inventors

• Heinz Schneider · Düren, DE
• Peter Fabian · Alzenau, DE

Key dates

• Filing date: Jun 13, 1996
• Grant date: Sep 9, 1997
• Expiry date: Jun 13, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/14
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A transport container for wafer-shaped objects to keep particles away from and remove them from the interior of the transport container when opening the latter, in particular also those particles located in the door gaps, without restricting handling. Cleaning in the form of a self-cleaning process should also be effective when a plurality of transport containers are stacked one on top of the other and the latter should be optionally accessible. At least parts of the rear wall region of a closable container enclosure are constructed as a plenum chamber which has a closable air inlet and a closable air outlet in the base region and cover region, and a connection is formed from the latter to the interior of the container via a filter. The air inlet is constructed so as to complement a connection of a gas reservoir and an air outlet of an additional transport container for coupling. The arrangement is applicable in the manufacture of integrated circuits.