Patent · US Expired

Method for producing thin film solar cell

US5665607A · kind A · utility

78Cited by
6References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 10, 1994
Grant dateSep 9, 1997
Priority date
Expiry dateJun 10, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/977

Abstract

In a method for fabricating a thin film solar cell, a thin semiconductor film serving as a power generating layer is formed on a substrate via an intermediate layer, a plurality of holes are formed penetrating through the thin semiconductor film and reaching the intermediate layer, and the intermediate layer is etched away through the through-holes, separating the thin semiconductor film from the substrate with high-efficiency. Since stress is hardly applied to the thin semiconductor film during the separation process, cracking and breaking of the semiconductor film is avoided. Further, since the surface of the substrate is maintained in good condition, the substrate can be reused, resulting in a reduction in the production cost.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.