Gas tight pressure sensor sealed with flexible metallic adaptor and having ceramic sensor element
US5665921A · kind A · utility
33Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 1996 |
| Grant date | Sep 9, 1997 |
| Priority date | — |
| Expiry date | Mar 4, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provision is made for a pressure sensor with a ceramic sensor element (1) which is introduced in a gas-tight manner, having a metallic housing (2) and having a metallic adapter (3) which is arranged between the sensor element (1) and housing (2) and which is connected in a gas-tight manner both to the housing (2) and to the sensor element (1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.