Patent · US Expired

Gas tight pressure sensor sealed with flexible metallic adaptor and having ceramic sensor element

US5665921A · kind A · utility

33Cited by
6References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 4, 1996
Grant dateSep 9, 1997
Priority date
Expiry dateMar 4, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L19/147
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provision is made for a pressure sensor with a ceramic sensor element (1) which is introduced in a gas-tight manner, having a metallic housing (2) and having a metallic adapter (3) which is arranged between the sensor element (1) and housing (2) and which is connected in a gas-tight manner both to the housing (2) and to the sensor element (1).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.