Grated landing area to eliminate sticking of micro-mechanical devices
US5665997A · kind A · utility
322Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1994 |
| Grant date | Sep 9, 1997 |
| Priority date | — |
| Expiry date | Mar 31, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/1843
Abstract
A digital micro-mirror device (10), whose contacting elements (11, 17) are not prone to stick together. In the case of a deflecting mirror device, landing electrodes (17) are covered with a grating (19), which reduces the contacting area but still permits conduction between the mirror (11) and the landing electrode (17). Alternatively, the landing electrode (17) can be fabricated as a grated surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.