Photoresist composition containing 4,6-(bis)chloromethyl-5-triazine initiator
US5667930A · kind A · utility
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Key dates
| Filing date | May 20, 1996 |
| Grant date | Sep 16, 1997 |
| Priority date | — |
| Expiry date | May 20, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0295
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photopolymerization photoresist composition having a binder resin, a multifunctional compound, a photopolymerization initiator, a sensitizer and other additives. The photopolymerization initiator has one or more 4,6-bis(chloromethyl)-s-triazine compound containing a diazophenyl group. The initiator acts as a chromophore and is represented by the following general formula I: ##STR1## wherein the position at which the diazo group bonds to phenyl group may be changed. R is an aliphatic radical or an unsubstituted- or substituted aromatic radical and n is an integer of 0 to 2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.