Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase
US5668524A · kind A · utility
23Cited by
15References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1995 |
| Grant date | Sep 16, 1997 |
| Priority date | — |
| Expiry date | Feb 9, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 10.sup.14 .OMEGA.-cm at 25.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.