Process of forming holes in a photosensitive resin layer to produce cathodes with microtips
US5669800A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 1995 |
| Grant date | Sep 23, 1997 |
| Priority date | — |
| Expiry date | Sep 26, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process for the formation of holes in a photosensitive resin layer, which can be applied to the production of electron sources having emissive cathodes with microtips and flat display screens. According to this process, a resin layer is exposed through a monolayer of balls transparent to an exposure light, with each ball focussing the light onto the resin layer and in this way bringing about the exposure of an area of said resin layer so that the thus exposed resin layer is developed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.