Spatial light modulator with buried passive charge storage cell array
US5671083A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1995 |
| Grant date | Sep 23, 1997 |
| Priority date | — |
| Expiry date | Feb 2, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A monolithic DMD spatial light modulator (20) including a storage cell array (24) of charge storage elements (30). Each charge storage cell (30) is formed using robust MOS processes, and comprises a pair of capacitors (32) having a polysilicon electrode fabricated over a substrate, and separated by a thin oxide dielectric. Each capacitor (32) is shielded by several light impermeable metal shields (37, 64, 66, 68, 72, 74, 80, 82, 88) to prevent discharging due to light incident to SLM (20). The substrate electrode (38) is encompassed by an n+ doped region (42) providing a source of minority carriers to an inversion region under the polysilicon electrode (50).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.