Microelectromechanical television scanning device and method for making the same
US5673139A · kind A · utility
332Cited by
7References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 19, 1993 |
| Grant date | Sep 30, 1997 |
| Priority date | — |
| Expiry date | Jul 19, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrically actuated microelectromechanical television scanning device for television image scanning or related functions. The scanning device can be produced in forms having characteristic dimensions in the submillimeter range. The scanning device consists of an electrostatically actuated plate with two degrees of freedom. A photoemitter, photoreceptor or other suitable device may be located on the plate, facilitating operation of the device as a flying spot scanner, television image dissector or television display. The scanning device can be fabricated similarly to monolithic integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.