Patent · US Expired

Scanning probe microscope

US5675154A · kind A · utility

26Cited by
44References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 24, 1996
Grant dateOct 7, 1997
Priority date
Expiry dateMay 24, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/869
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.