Process for the production of a microtip electron source
US5679044A · kind A · utility
4Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1995 |
| Grant date | Oct 21, 1997 |
| Priority date | — |
| Expiry date | Sep 28, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to this process a structure is produced comprising an insulating substrate (32), at least one cathode conductor (34), an insulating layer (36), a grid layer (40) and holes (42) are formed through the grid layer and the insulating layer, on the grid layer using a wet chemical deposition method is produced a lift-off layer (44), followed by the deposition on the assembly of an electron emitting material layer (52) and the elimination of the lift-off layer. Application to the manufacture of flat screens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.