Diamond-like carbon wet etchant stop for formation of magnetic transducers
US5681426A · kind A · utility
4Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 13, 1995 |
| Grant date | Oct 28, 1997 |
| Priority date | — |
| Expiry date | Dec 13, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T409/303752
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.