Resonance contact scanning force microscope
US5681987A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 12, 1996 |
| Grant date | Oct 28, 1997 |
| Priority date | — |
| Expiry date | Apr 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.