Single body injector and method for delivering gases to a surface
US5683516A · kind A · utility
32Cited by
17References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1996 |
| Grant date | Nov 4, 1997 |
| Priority date | — |
| Expiry date | Mar 22, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45595
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A single body injector for delivering gases to a surface. The injector includes a single elongated block with one or more passages formed in the block and communicating with a gas delivery surface via thin channels which extend between the passages and the gas delivery surface. Metering tubes may be placed in the passages to control the profile of the gases delivered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.