Method and apparatus of producing cavities in LTCC substrates
US5683535A · kind A · utility
12Cited by
8References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 25, 1996 |
| Grant date | Nov 4, 1997 |
| Priority date | — |
| Expiry date | Jul 25, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/4857
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus which replaces the silicone molds heretofore utilized for protecting the integrity of the cavities formed during the lamination lay-up stage of a low temperature cofired ceramic substrate fabrication. Now a single sheet of compliant latex rubber is now applied over a polyimide template placed on top of the laminations following their stack-up on a tooling plate. Upon the application of pressure in an isostatic lamination procedure, the sheet of latex rubber acts to safely transfer laminating pressure to the cavities formed in the composite substrate structure without rounding the corners or edges thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.