Ceramic heaters and heating devices using such ceramic heaters
US5683606A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 1994 |
| Grant date | Nov 4, 1997 |
| Priority date | — |
| Expiry date | Dec 20, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/141
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ceramic heater includes a substrate made of aluminum nitride, a resistive heating element buried in the substrate and made of a metal having a high melting point, and terminals electrically connected to the resistive heating element and buried in said substrate. The terminals are made of a metal having a high melting point and a coefficient of thermal expansion not smaller than that of the substrate. The metal of the resistive heating element has a coefficient of thermal expansion not smaller than that of the substrate. The coefficient of thermal expansion of each of the terminals and the resistive heating element is in a range from 5.0.times.10.sup.-6 /.degree.C. to 8.3.times.10.sup.-6 /.degree.C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.