Patent · US Expired

Ceramic heaters and heating devices using such ceramic heaters

US5683606A · kind A · utility

32Cited by
14References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 1994
Grant dateNov 4, 1997
Priority date
Expiry dateDec 20, 2014

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05B3/141
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A ceramic heater includes a substrate made of aluminum nitride, a resistive heating element buried in the substrate and made of a metal having a high melting point, and terminals electrically connected to the resistive heating element and buried in said substrate. The terminals are made of a metal having a high melting point and a coefficient of thermal expansion not smaller than that of the substrate. The metal of the resistive heating element has a coefficient of thermal expansion not smaller than that of the substrate. The coefficient of thermal expansion of each of the terminals and the resistive heating element is in a range from 5.0.times.10.sup.-6 /.degree.C. to 8.3.times.10.sup.-6 /.degree.C.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.