Object fixturing in interferometer
US5684594A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1996 |
| Grant date | Nov 4, 1997 |
| Priority date | — |
| Expiry date | Apr 18, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object fixturing system applies to an interferometer having a pair of diffraction gratings arranged to produce and recombine test and reference beams. The fixturing system positions an object between the diffraction gratings so that a test beam is incident on a surface of the object at a grazing incidence angle. A positioning fixture engages the object and a reference surface of the interferometer in moving the object to a measurement position on a window platform that transmits the test and reference beams. The fixture is then removed for a simultaneous measurement of an entire surface of the object, which can be clamped in place if necessary by a clamping window that also transmits the test and reference beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.